LASER 2025: MKS presents comprehensive portfolio of new systems

25 Jun 2025

Ranging from high laser powers, through ultra-short pulses, to precise positioning technologies.

by Matthew Peach in Munich

MKS Inc. is demonstrating a new range of photonics technologies at this week’s Laser World of Photonics, in Munich. In Hall A3, booth 314, MKS and its Photonics Solutions Division (PSD) brands Newport, Ophir, and Spectra-Physics are showcasing new products, individual OEM developments, and manufacturing solutions.

Markus Rütering, VP Sales PSD, EMEIA, said, “We are offering end-to-end solutions that enable innovation, precision, and high throughput in high-tech industries and scientific research. Through our customer-specific design and development as well as our dedicated choice of components, subsystems, and systems that are optimally tuned to each other, we create real added value.”

The two Spectra-Physics Laser Talon Mark UV15 and UV20 lasers are now expanding the MKS portfolio for laser marking. The two pulsed lasers deliver output powers above 15 W and 20 W, respectively. The resulting high pulse energy of up to 400 μJ makes it possible to mark a variety of materials.

By further expanding the Spectra-Physics Talon product family with the Talon APX series, MKS says it is meeting “the high demands on throughput and durability for the micromachining market.” The new Talon APX nanosecond lasers operate in the 15 to 30 W power range. They offer longer maintenance cycles compared to conventional UV lasers, achieve higher productivity, and reduce operating costs, the company says.

Chip-making and wafer-focused solutions

The air-bearing positioning system Newport Positioning System HybrYX™-HD operates under five-fold acceleration (5 g) and is characterized by smooth movements and high-positional stability. A soft isolation system ensures low vibrations.

Furthermore, Newport’s Parallel Robot for wafer-to-wafer hybrid bonding offers precise positioning for both surface alignment and through-silicon alignment. The company states, “This solution impresses thanks to its integrated infrared cameras with a repeatability of ±100 nm during alignment and an XY stability (30 s) of ±10 nm during bonding. A further version with a larger range in the Y direction also enables the bonding of 300 mm wafers.”

In the optics sector, for the first time, MKS is presenting its Newport ODiate Raman Longpass Optical Filters at this year’s Laser show. The optical Raman long-pass filters have been specially developed for Raman spectroscopy. They are manufactured using the advanced Newport ODiate thin-film process, offering improved signal clarity, and simplified system design.

The ODiate Fluorescence Filter sets include both single-band and multiband filters for fluorescence imaging. The dual-band filters combine DAPI/TRIPTC and FITC/Cy5 filters without affecting the signal strength. The multiband filter sets accelerate image-taking in fluorescence microscopy and flow cytometry. They can also be used in diagnostic instruments based on polymerase chain reaction (PCR).

MKS is also presenting the Ophir 70K-W High Power Sensor with the so-called Power from Pulse function. The sensor measures laser power up to 70 kW in continuous wave mode, targeting industrial and defense applications. Power from Pulse also enables precise power measurements with short pulses and thus extends the measurement capacity to up to 100 kW.

Two new models in the Ophir BeamSquared® product family have been added to the MKS portfolio: The Ophir BeamSquared SP204S-PRO beam propagation analyzer quickly and accurately measures the propagation characteristics of continuous wave and pulsed lasers with extended Rayleigh lengths (up to 40 m) at standard and large beam diameters.

The Ophir BeamSquared SP1203 M2 beam propagation analyzer includes the Ophir SP1203 GigE beam analysis system and is suitable for precise measurements of lasers with small diameters (up to 150 µm in the SWIR and NIR range) and long Rayleigh lengths that need to be focused in tighter spots.

Finally, MKS is now adding Newport Solaris Series Class A+AA Solar Simulators to its portfolio. The solar simulators use a xenon arc lamp as the primary emitter to simulate sunlight. With its intense, continuous spectral range from UV to VIS to IR, the reliable, broadband light source closely approximates natural sunlight. The maximum available irradiation area of 30.5 x 30.5 cm is a special feature for table-top devices.