Mattson and Sandia team on rapid thermal processing development

17 Jun 2002

Mattson Technology and Sandia National Laboratories have announced a strategic relationship to license advanced technology for Mattson's ASPEN RTP rapid thermal processing system. The agreement, which is the result of a preliminary Joint Development Project over the past year along with a concurrent global Joint Development Project, will accelerate the development of key RTP technologies for 200 mm and 300 mm semiconductor processing.