Lambda Physik to provide excimer laser systems to Silicon Valley Group

17 Jun 2002

Lambda Physik (Fort Lauderdale, Florida) has received multiple orders from Silicon Valley Group (San Jose, California) for 2 kHz pulse rate NovaLine excimer laser systems. The NovaLine K2020 is a 30 W (15 mJ/pulse) 248 nm KrF laser which SVG will use for catadioptric lens design while the Novaline A2020 is a 20 W (10 mJ/pulse) 193 nm ArF laser designed specifically for SVG's 193 nm lithography production systems.