Lambda Physik to provide SVG Lithography with excimer laser systems

17 Jun 2002

Lambda Physik (Fort Lauderdale, Florida) has received multiple orders for high-performance laser systems from Silicon Valley Group (San Jose, California). The NovaLine ArF excimer laser systems, which operate at a 2 kHz pulse rate, will be integrated by SVG Lithography with high-throughput production versions of 193 nm systems.