Plasma-Therm sells plasma system to Motorola for lithography development

17 Jun 2002

Plasma-Therm, Inc., has sold a Versalock plasma processing system to Motorola, Inc., for research and development activities. Versalock uses Plasma-Therm's Inductively Coupled Plasma technology and will be used to develop masks for advanced lithography techniques. The research and development work is expected to develop etch technology processes for sub-0.13 micron design rules which conventional lithography often cannot perform.