Ion Systems, Hamamatsu partner to develop photon ionization technology

17 Jun 2002

Ion Systems has announced a strategic partnership with Hamamatsu Corporation to develop photon ionization applications and market the products based on the soft x-ray technology ionizer developed by Hamamatsu Photonics for the semiconductor and flat panel display manufacturing industries. Ion Systems and Hamamatsu will concurrently develop photon ionization solutions for 300 mm manufacturing. The agreement combines Hamamatsu's technology in manufacturing photonic devices with Ion Systems' expertise in cleanroom ionization and static charge control.