30-mm wafer marking system shipped

17 Jun 2002

Lumonics/Oxnard Operations (Oxnard, CA) claims to have shipped the first 300-mm wafer-production laser-marking system. The Nd:YAG-laser-equipped Wafer-Mark DSC300 was purchased by Shin-Etsu Handotni (Tokyo, Japan), which will use the system on its 300-mm pilot line to hard mark the wafers before they are etched and polished. The production laser marker has a throughput rate of 200 wafers per hour.
Courtesy of Laser Focus World