22 Oct 2008 MicroPhase® turns any optical microscope in an affordable 3D measurement tool. MicroPhase® is the ideal tool for surface characterization and 3D measurements such as heights and roughness parameters. MicroPhase® fits on any microscope with its standard c-mount as a video CCD camera with no need of additional optics or accessories. MicroPhase® is a flexible instrument, adding 3D visualization and measurement capabilities without alteration of microscope observation modes.
Automatic acquisition and processing are performed by software providing easy operation, fast and accurate results. Axial range of up to 1 mm is achieved with repeatability of 10 nm, while measuring roughnesses in the range between 0.1 to 3 um. Areas of up to 100 x 100 mm are measured with software stitching capability.
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