22 Oct 2008 SurPhase is a stand-alone 3D video microscope integrating a high resolution CCD camera, a controlled LED illumination and an objective turret with 6 positions for sample analysis in reflection. SurPhase is a new easy-to-use, fast and cost-effective tool for 3D surface characterization, combining 2D video microscopy and 3D measurement capabilities in nanometric resolution range according to ISO standards. Software performs automatic acquisition and processing are by providing easy operation, fast and accurate results. Axial range of up to 1 mm is achieved with 10 nm repeatability with fast acquisition and processing time, typically less than 10 sec. Roughnesses between 0.1 and 3 um can be measured. Areas of up to 100 x 100 mm are processed with motorized scanning stage and software stitching capability.
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