22 Oct 2008 The new SurPhaseHS® sensor allows very fast 3D measurement for the shop floor or in line production. PhaseView offers both turnkey and OEM version to ease integration in automated inspection systems. Roughness with Ra below 1nm or profiles up to 500 µm height can be measured in less than 1 second for 1M measurement points, with high accuracy and repeatability.
This new 3D optical instrument comes in a smart light weight packaging, and is totally insensitive to vibrations for use in any industrial environment. The total measurement and processing time for the area of 2 x 2 mm does not exceed 2 seconds. With axial range up to 500 µm, axial repeatability of 10 nm is achieved. Roughnesses from 0.1 to 3 µm can be measured. Areas of up to 100 x 100 µm can be measured and processed with enhanced software stitching capability.
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