ASML to acquire MaskTools division from MicroUnity

17 Jun 2002

ASM Lithography (Veldhoven, The Netherlands) has completed an agreement to acquire the MaskTools business unit of MicroUnity Systems Engineering, Inc. (Sunnyvale, California). The division will be renamed ASML MaskTools and will add its portfolio of retical design and mask qualification products to ASML's lithography capabilities.