KLA-Tencor, IMEC agree to team on inspection system development

17 Jun 2002

KLA-Tencor Corp. and IMEC have announced a cooperative agreement to develop new processes to meet future inspection and measurement requirements. KLA-Tencor, which provides process control solutions for semiconductor manufacturing and related industries, will participate in the IMEC Industrial Affiliation Program as an equipment supplier while IMEC will use KLA-Tencor's inspection and measurement equipment in its IIAP research programs. The organizations will pool their technologies for joint research and development programs.