30 Jul 2014 The 3-axes positioning element, the TRITOR 320 CAP offered by piezosystem jena, is an actuator for high accuracy positioning. The TRITOR 320 CAP was developed with use of FEM-technology with the goal of accuracy positioning and outstanding dynamics of large loads. The performance of the TRITOR 320 can be attributed to its construction with flexure hinges, that are completely free of friction. Through the use of capacitive sensors the TRITOR 320 CAP achieves excellent precision, which is reflected in a high reproducibility and linearity and stability. Especially in applications of the semiconductor industry, surface analysis, mask inspection, the TRITOR CAP 320 is an excellent and recommended product.
Key-Features:
•precise and high dynamical movement
•load up to 200N
•1 nm resolution in closed-loop
•motion up to 320 µm
•possibility of adjustment for vacuum- and low temperature application
•aperture 150 x 150mm on request
For further information on the TRITOR 320 and wafer positioning, please visit www.piezosystem.com or email info@piezojena.com. |
