19 Feb 2012 The NPXY10Z5A is a closed-loop XYZ nanopositioner with 10μm x 10μm x 5μm range of motion. The high resonant frequency in the Z axis makes it ideal for AFM (Atomic Force Microscopy) applications. Like most nPoint scanners it uses capacitive sensors for closed loop feedback. It is made of Invar and is also UHV compatible.
Position Noise XY-0.3nm Z-0.1nm
Settling Time XY-5ms Z-2ms
Resonant Frequency XY-1200Hz Z-9000Hz
Applications
• Near-Field Scanning Optical Microscopy
• Scanning Probe Microscopy
• Lithography
• Nanometer-scale Manipulation
• Metrology | 
