13 Oct 2009 The polished LiTaO3 wafer is widely used in resonators, filters, transducer and the others electronic communication devices. Diameter: 2 inch, 3 inch, 4 inch, 5 inch - 7 inch
In accordance with the provisions of standard production
Thickness: 500±15 µm, 660±15 µm, 710±15 µm, 790±15 µm, 1000±20 µm
Orientation: X-Axis Y-Axis Z-Axis ±0.1°
Y-axis 128° Rotated, Y-axis 64° Rotated, Y-axis 41° Rotated
The first reference to the Orientation: ± 0.2°
The first reference to the length: 16.0±0.8 mm, 22.0 ±1.0 mm, 32.5±1.5 mm
In accordance with the provisions of standard production
The second reference length: 10±2 mm, 12±2 mm
TTV ≤10 µm ≤15 µm ≤20 µm ≤30 µm
BOW ≤10 µm ≤15 µm ≤20 µm ≤30 µm
Front Surface: 10/5
Back Surface: Fine ground (#240/#180); Polished (10/5)
Chamfer: < 0.3 mm, 45°±5° |
