08 Oct 2008 Imagine Optic’s SH-LTP is the ideal solution for performing highly accurate, bidimensional, sub-microradian characterization of large optical component surfaces and planeness of semiconductor wafers. The SH-LTP is comprised of an illumination system functioning at 405 nm and a high-accuracy Shack-Hartmann wavefront sensor that incorporates our patented rotated-square technology in the microlens array to increase spatial resolution to the sub-millimeter level. Compact, robust and easy to integrate into existing setups, this flexibly designed system can also be delivered with its own translation stage.
Our proprietary software, StitchWave™, enables the SH-LTP to accurately measure the surface of large optics at the sub-microradian level, while minimizing translation effects. Key points include:
Superior accuracy by stitching
Sub-microradian performance (accuracy, sensitivity, repeatability)
Simple and robust design
Wide curvature dynamic range
Sub-millimeter spatial resolution |
