01 Nov 2006 Fast and Low Cost Spectroscopic Ellipsometer and Mueller Polarimeter HORIBA Jobin Yvon introduces the MM-16, a spectroscopic ellipsometer dedicated to the advanced characterization of film thickness and optical constants for a broad range of materials such as semiconductors, compounds, alloys and organic thin films.
The MM-16 has a simple optical configuration using liquid crystals (LCs) as polarizer. Each Ellipsometer heads contains two LC modulators, each modulator having two possible polarisation states. By measuring all possible combinations of states for each modulator (16 measurements total), and with no moving parts during signal acquisition, the MM-16 measures the full polarization state matrix (Mueller matrix) of a sample in less than 2 seconds. This capability allows accurate, simple and easy characterisation of anisotropic and depolarizing materials.
The MM-16 detection system includes a high resolution spectrograph coupled to a 2048 pixel CCD all controlled by HORIBA Jobin Yvon spectroscopic ellipsometry software, Delta Psi 2. The MM-16 can measure multiple layer films thickness from a few angstroms to several microns. Its unique optical set up makes it especially suitable the characterization of thin films deposited on transparent substrates such as those found in OLED, solar cell, or photovoltaic applications. The additional Mueller matrix information allows the quantification of the important parameters necessary to characterise liquid crystals displays and coatings accurately. With the optional addition of a motorised mapping stage the MM-16 is the perfect characterization tool for display applications. |
