17 May 2006 ExciLife-193nm OEM Coatings Revolutionize Excimer Laser Optics
Princeton Instruments/Acton, the worlds leading provider of high-end optics and optical coatings, continues to push the boundaries of technology with the new ExciLife-193, high durability, 193nm optical coatings for OEMs.
ExciLife coatings are a significant breakthrough in high-performance, 193nm laser mirror coatings, designed for OEM applications where high durability and long term resistance to laser damage are critical.
"The new ExciLife-193 coatings represent an important and exciting breakthrough in VUV coating technology," states Michael Case, Vice President of Research and Development. "They combine high durability with exceptional laser performance, which makes them the ideal choice for use in next generation LASIK systems, immersion lithography, material processing, industrial marking and wafer exposure systems".
ExciLife-193 coatings are guaranteed better than 97% reflectance at 193nm. They also pass MIL-SPEC adhesion, abrasion and humidity tests, making them the most robust UV coatings commercially available. Additionally, in lifetime testing, this 45 degrees design was tested with an argon fluoride (ArF), 193nm excimer laser at 300mj/cm2, 100 and 200Hz for two million laser pulses without damage or change in reflectivity. To simulate immersion lithography applications, the ExciLife-193 was placed in DI-water for one week and then laser tested at >500mj/cm2, 100Hz, 100,000 pulses without damage. The new coatings are available in OEM quantities and can be optimized for use at incidence angles from 0 to 45 degrees.
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