21 Aug 2006 DSM's flexure-guided, piezoelectric nanopositioning stages provide up to 1 mm of displacement. As an example of DSM's ability to design flexure-guided, piezoelectric nanopositioning stages, the CZSA-1000 Z-stage provides a total displacement range of 1 mm in a 25 mm stage height. In semiconductor industry applications, the stage has been implemented in closed-loop control using DSM's SA series servo amplifier and a high-resolution capacitive probe for 20nm position stability and very stable velocity profiles.
Another custom nanopositioning application required motion control in both X and Y axes. DSM integrated capacitive probes into a flexure-guided, 150 micron range piezo stage and used SA series linear servo amplifiers to provide stand-alone servo control. Using the SA series amplifier, a 24-bit analog input accepts the position target signal, and digital I/O provides flags for "in-range" and data acquisition triggers.
DSM welcomes requests for custom nanopositioning systems. |
