Jenoptik offers an advanced level of microoptics system integration for Semiconductor and FPD-equipment manufacturers

Date Announced: 24 Jan 2011

During Photonics West 2011, Jenoptik’s Microoptics business unit will present demonstrators of microoptic technology for improving current and next generation products.

Semiconductor and Flat Panel Display-fabrication equipment is getting more and more sophisticated to meet the huge challenges of shrinking feature dimensions and larger wafer and panel size. This leads to a demand for custom specific microoptics with increased performance and extraordinary optical properties. Ultimately the microoptical components have to perform in conjunction with optics, electronics and mechanics.

There is a growing trend that Semiconductor and FPD-equipment manufacturers require a higher integration level in order to simplify the interfaces between their systems and the optical sub-systems with integrated microoptical functionality.

Therefore the Microoptics business unit strengthened it’s capabilities to follow this trend. As a result, a comprehensive portfolio of advanced system-integration methods and tools is available. Assemblies, interconnections, contacting and compounds of our custom specific microoptics with opto-electronical components, PCB’s and micro-machined parts can be realized. This is done using highly sophisticated technologies, e.g. gluing and optical contacting of 3 dimensional stacks and modules consisting of optical glasses, metals, electronics boards and semiconductors with flatness and placement accuracies down to sub-micron level.

These integration activities are performed in recently extended class 100 clean rooms with specifically designed alignment tools, such as a 6 axes robot. Moreover, Jenoptik developed processes for the fabrication of sub-micron optical structures on top of optoelectronic sensors or sensor arrays as well as for sub-micron structuring of membranes for microoptical systems working in the Extreme Ultraviolet (EUV).

Detailed information on the range of services available from Jenoptik’s Optical Systems division at the PHOTONICS WEST trade fair can be found at www.jenoptik.com/photonics

To gain an insight into the numerous applications of solutions devised by the Microoptics business unit, visit us at South Hall, booth #1323.

Contact

E-mail: info.os@jenoptik.com

Web Site: www.jenoptik.com/photonics