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Increased capabilities for CaF2 Microoptics manufacturing

Date Announced: 24 Jan 2011

Jenoptik´s Microoptics business unit demonstrates its commitment as a leading provider in DUV solutions by expanding its capabilities in manufacturing CaF2 microoptics. This offers the ability to fabricate very flexible refractive and diffractive microstructures in calcium fluoride.

Compared to conventional materials, CaF2 is ideal for high power laser systems, ensuring longer operation time and higher damage threshold. Jenoptik´s know-how and production capabilities offer a wide range of custom manufactured micro-optics, i. e. refractive microlens arrays, diffractive diffusers, beamshapers and beamsplitters, which are most suitable for any application that requires excellent uniformity, efficiency, and high power. Jenoptik does not rely on cylindrical or rotationally symmetric surfaces to create fly’s eye homogenizers. As a result, we can accomplish the same function in fewer surfaces.

The expansion of Jenoptik CaF2 technology includes an investment to increase fabrication capabilities and add further flexibility in the final optical design. The investment is planned to be complete by the end of Q1/2011 and will result in CaF2 microoptics with increased efficiency and better uniformity for Semiconductor and Inspection applications. This investment also serves as an increase in overall capacity, which will position Jenoptik to be ready for any production ramp ups as required.

Detailed information on the range of services available from Jenoptik’s Optical Systems division at the PHOTONICS WEST trade fair can be found at www.jenoptik.com/photonics

Contact

Dr. Markus Besenbeck
Director Marketing & Business Development

E-mail: info.os@jenoptik.com

Web Site: www.jenoptik.com/photonics

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