Detail of a semiconductor wafer fabricated by the foundry giant TSMC. Along with some other chip makers, the Taiwanese company is looking to introduce EUV lithography on its manufacturing lines in the next couple of years. One of the final pieces of the EUV technology "ecosystem" still to be put in place is the photoresist element, with Inpria saying that its more sensitive tin oxide material will help the industry to ramp EUV processing. Photo: TSMC. |
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