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Defense+Commercial Sensing Showcase
Potentially a new class of motion sensors
Scanning electron microscope image of an array of optomechanical accelerometer devices formed in the surface of a silicon microchip. Highlighted green areas represent the proof masses, suspended across the open etched areas of the chip. The much smaller rectangles attached to each mass are the optical cavities which sensitively read out the motion of the proof masses. Credit: Martin Winger/CalTech.
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