Optics.org
daily coverage of the optics & photonics industry and the markets that it serves
News
Menu
EUV tool at IMEC
ASML pre-production scanner NXE:3100 for extreme UV lithography, installed at IMEC's 300mm cleanroom. Under the new collaborative agreement, ASML will install its production-ready NXE:3300B system. Credit: IMEC.
Copyright © 2020 SPIE EuropeDesigned by Kestrel Web Services