ASML's EUV tools, which already sell for upwards of €150 million, are set to get even more expensive when chip production starts migrating to high-NA equipment capable of producing even tinier features. That technology is still in development but the first high-NA EUV machine is now under construction at ASML's Veldhoven headquarters. Volume production with the tools is expected to start in 4-5 years from now. Photo: ASML. |
© 2024 SPIE Europe |
|