 |
 |
| The DUV laser system consists of three parts (i) a Ti-Sapphire laser (ii) BBO crystals to perform frequency conversion to the UV and (iii) KBBF crystals to perform frequency conversion to the DUV. The initial T-Sapphire laser is pumped by a 532 nm source. |
| © 2023 SPIE Europe |
|
