Precision Polished Substrates

28 Aug 2024

Ohara is a world class manufacturer of high-quality double-side lapped and polished substrates suitable for use at 248 nm. Exhibiting unmatched cleanliness, precision, and surface roughness and flatness values, Ohara’s substrates boast a remarkable array of features that make them the standout choice for an array of cutting-edge applications.

Materials:

Ohara supplies polished substrates made with the following materials: quartz, fused silica, optical glass, silicon and more.  

Sizes:

Precision Polished Substrates are available in sizes anywhere from 25 to 360mm in diameter. Ohara also supplies 5”-6” square photomask substrates as well as custom sizes.

Superior Surface Roughness & Flatness Values:

Ohara’s substrates deliver exceptional RMS values of ~2 Angstroms (via AFM) and flatness values of ~1 micron (via Tropel Fatmaster), making it the perfect choice for applications requiring high-performance, precision, and accuracy.

High Refractive Index Wafers:

Ohara’s high index (nd 1.8-2.001) Precision Polished Substrates display excellent transmittance, outstanding chemical resistance, and are ideal for low-cost, high-performance consumer applications including AR/VR and other wearable devices.

Flawless Quality:

One of the key advantages of Ohara’s Precision Polished Substrates is its exceptional cleanliness. With a 16 bath Megasonic Cleaning Unit, automated scrubbing, and a Class 100 Clean Room, these wafers are made to ensure consistent and reliable performance in various optical elements.

Excellent Metrology Capabilities:

Ohara's commitment to metrology is evident in its use of the following equipment: Atomic Force Microscope (AFM), Zygo New View and Zygo GPI Interferometers, and Tropel Flatmaster.

Applications:

Ohara SK1300 Precision Polished Substrates are used at the forefront of cutting-edge technology, including wafers for Thin-Film Transistors (TFT), substrates for photomasks, optical elements for semiconductor devices, and so much more.