07 Jun 2013 PI and PI miCos provide extensive expertise in designing, manufacturing and preparing precision positioning systems for special environments such as cryogenic and vacuum. Motorized linear and rotary positioners, piezo flexure stages and actuators as well as 6-axis parallel kinematic hexapods are offered in different levels of vacuum preparation, from fine vacuum (10-3 torr) to UHV (10-10 torr).
The required modifications depend on the application. Beamline-instrumentation can have different requirements than semiconductor manufacturing and testing equipment, for example and the absolute pressure is often of lower importance important than the partial pressure of hydrocarbons in the vacuum.
For more information and an overview of vacuum compatible products click here:
http://www.pi-usa.us/products/precision_positioning_pi-micos/Vacuum_Precision_Positioning_Stages_Mc.php
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