04 Mar 2013 DynaFiz™ interferometer is a new instantaneous Fizeau tool, optimized for dynamic metrology in the presence of extreme vibrations and air turbulence. The light-efficient optical design, combined with a high power, stabilized HeNe laser, offers fast shutter rates to freeze disturbances. Its high resolution camera provides enhanced surface characterization, including form, waviness, and microwaviness. ZYGO’s new Mx™ software with LivePhase™ enables real-time Zernike analysis for active alignment and dynamic testing of optical systems. The DynaFiz interferometer can be configured with a phase modulator for added versatility and ultra-high performance on-axis metrology. |