09 Mar 2012 Introduction
Simple, compact and powerful digital lens less microscopy system for MEMS, Microsystems, and micro-fabrication process in section and characterization with nanometer depth/height resolution. The novel features are full field and real-time 3D imaging and measurements of samples in non-contact mode.
Attractive Features:
Nanometric depthheight resolution
Full field analysis
Real-time measurement
Non-contact and non-invasive
Interactive software
Model CDH-C CDH-D CDH with stage
Field of view 4 mm 2 mm User defined
Lateral resolution 10 μm 6 μm System dependent
Axial resolution 10 nm 10 nm 10 nm
Dynamic characterization 1 MHz vibration frequency 1 MHz vibration frequency 1 MHz vibration frequency
Deformation sensitivity 1 nm 1 nm 1 nm
Dimensions (L×W×H) 55 mmx75mmx125mm 55 mmx75mmx125mm Stage size dependent
Weight 400gm 400gm Stage weight dependent
Sample requirement Good reflective sample surfaces with sample surface < 300nm Good reflective sample surfaces with sample surface < 300nm Good reflective sample surfaces with sample surface < 300nm
Please contact us for more information, email: info@wavelength-tech.com http://www.wavelength-tech.com |
