29 Jun 2009 Vertical stage completes range for 2.5 nm resolution multi-axis positioner family
ANT range is a complete high-throughput positioning and motion control solution for nanometre scale applications Aerotech has added a new vertical translation stage to its ANT range of ‘nanotranslation’ linear position stages providing 500 mm/sec speed, 1 g acceleration and a positioning resolution between 2.5 nm and 1.0 µm over a 25 mm or 50 mm travel range. The new ANT-LXV vertical translation stage combines Aerotech’s latest direct-drive linear servo motor, encoder feedback and bearing technology with advanced axis calibration in a design that includes an integral pneumatic counterbalance to ensure totally smooth, stiction-free vertical motion.
The ANT-LXV provides the vertical positioning component to compatible ANT-LX stages, and brings X, Y and Z positioning in an extremely compact form factor for high-throughput production and test applications nanometre level positioning and scanning. |
