05 May 2009 The MM-16 NIR spectroscopic ellipsometer is dedicated to thin film characterisation determining thickness, optical constants n,k & optical bandgap of materials in the wavelength range 515-1000nm. MM-16 NIR features a CCD detection system for rapid and accurate measurement down to 1s / determination, and a 200µm microspot allows characterisation of patterned samples. When fully automated the system provides fast uniformity mapping of film thickness & optical constants. The design of the MM-16 NIR is such that it may be configured in several ways & is easy-to-use for demanding research, process development & industrial applications in the photovoltaic, optoelectronic & telecommunication area.. It is controlled by the DeltaPsi2 software platform that is common to HORIBA Scientific thin film metrology tools. This provides display of mapping results on semiconductor wafer & glass panels, statistical analysis of data, import/export package function, & data reprocessing capabilities. |
