27 Feb 2009 New H-bridge gantry builds on a legacy of air bearing stage designs to address the requirements of high-end equipment manufacturers for motion systems with improved throughput and increased precision The new PlanarHD air bearing stage from Aerotech features several design enhancements for increased throughput in ultra-high precision step-and-settle and scanning applications such as semiconductor processing and emerging MEMS/Nano technologies. The 500 mm x 500 mm travel stage includes larger air bearing surfaces for significantly improved dynamic characteristics as well as higher power linear servo motors on both axes to deliver an impressive specification that includes a 2 m/sec scan velocity and peak acceleration to 5 g - with a positioning resolution of up to 0.25 nanometres, repeatability to 50 nanometres and accuracy to +/- 300 nanometres. | 
