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X ray, EUV Spectrometer

07 Jan 2009

The McPherson 251MX spectrometer enables simultaneous spectral detection over a wide range, reduces calibration errors, and increases the amount of data collected in a given amount of time.

McPherson, Inc. is pleased to release an x-ray and EUV spectrometer, Model 251MX, for wavelength dispersive spectral measurements from 60 to 2000eV. The 251MX provides flat field spectra with its specially designed diffraction gratings. Data is acquired quickly and easily with direct-detection CCDs. Clean, stainless steel chamber and vacuum-prepared internal components allow efficient pumping for high vacuum or UHV. The 251MX’s small size simplifies integration to experiments. Gratings have square groove profiles; the laminar design helps to reduce effects of high orders. The instrument delivers high resolution spectra. Applications include: soft x-ray plasma diagnostics, analysis of HHG EUV lasers, characterization of EUV sources for advanced semiconductor lithography processes.

CONTACT DETAILS
McPherson
7-A Stuart Road
Chelmsford
MA
01824-4107
United States
Tel: 978 256 4512
Fax: 978 250 8625
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