24 Oct 2008 The simple spectroscopic ellipsometer for thickness and optical constants of thin/ multi layers.
This new thin film measurement tool has been designed to fulfil thin film quality control requirements. It provides full automation (loading, alignment, mapping), automated selection of 8 different spot sizes down to 25x60 µm and a unique integrated sample vision system. It is controlled by the intuitive Auto Soft software that enables push button thin film analysis for routine operation, with advanced engineering and service modes available for characterising |
