22 Sep 2008 Two part stage design with cross roller bearings includes a direct drive linear motor and glass scale encoder with 40 MHz encoder processing for sub-nanometre resolution and jitter-free scanning Aerotech’s new ALS130H series linear motor driven positioning stages have been designed for ultra high precision scanning and positioning applications where sub-nanometre level resolution needs to be combined with exceptional smoothness, high traversing speeds and fast acceleration over travel ranges up to 150 mm. The classic two-part stage design outperforms leadscrew driven alternatives with their inherent friction related stick-slip problems and offers a far higher load acceleration force than piezo based positioners. | 
