09 Jul 2008 The UVISEL+ RM extends the capability of the UVISEL with an independent Reflectometry Module (RM). The RM module is available as an option or an upgrade for current models of the VISible and NIR UVISEL Spectroscopic Ellipsometers. The module is simply connected to the Xenon lamp and monochromator of the UVISEL via two optical fibres. The RM allows Reflectance measurements at normal incidence over the wavelength range 210nm–2100 nm with a 200 µm measurement spot, and through the integration of ellipsometry and reflectometry the UVISEL+ RM enables flexible and accurate measurements. | 
