01 Apr 2008 Sub-micron to sub-nanometer precise compact actuators: novel ceramic motors to classical motors.
Systems range from pen-tip-sized ceramic actuators for high-volume optics & medical applications, to high-force non-magnetic ceramic actuators for ultra-precision vacuum applications.
High-speed ultrasonic actuators provide velocity to 800 mm/sec (32 in/sec) and accelerations to 20g, while flexure actuators respond to control input in as little as a few 100 µsec to operate fast pumps or position optics in high-speed focusing or alignment applications. | 
