21 Jan 2008 Very high-resolution McPherson spectrometer features 2m focal length. Reflective optics are used for spectral agility and unique focal plane formation covers 300mm wavelength space. Spectral resolution of about 10 to 15 picometer FWHM is attained. McPherson, Inc. (Chelmsford, MA USA) a manufacturer of instrumentation for measuring wavelengths of light received a contract from WaferMasters, Inc. (San Jose, CA USA) a manufacturer of thermal processing tools used to fabricate advanced semiconductor devices.
Under this contract, McPherson assisted with design, fabricated and delivered very high resolution Visible light spectrometers. The very high-resolution McPherson spectrometers features 2m focal length. Large masterpiece reflective optics are used for spectral agility and wide-wavelength-range optical performance. Unique focal plane formation covers about 12" in wavelength space. Multiple detectors, even multiple focal plane array CCD detectors, can be mounted to simultaneously detect a variety of wavelengths. Spectral resolution of about 10 to 15 picometer full width half maximum is attained totally across the large focal plane.
WaferMasters uses the McPherson spectrometers for diverse measurements of processed semiconductor wafers and to more tightly control the characteristics of the Silicon end-product. The unique high resolution micro Raman spectrometer enables non-destructive evaluation of processed wafers, giving information commonly only accessed through Transmission Electron Microscopy. The McPherson instrument enables this by allowing simultaneous, very high spectral resolution measurements. Future possibilities for related process controls include systems working deep in the ultraviolet.
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For more information contact:
Erik Schoeffel
McPherson, Inc., 7A Stuart Road, Chelmsford MA 01824-4107
Telephone 978-256-4512 (or 1-800-255-1055), Fax 978-250-8625
Email MCP@McPhersonInc.com
http://www.McPhersonInc.com |
