10 Aug 2007 PI's new XYZ nanopositioning piezo system, model P-733.3CD. is designed for materials testing / research, high resolution microscopy and imaging applications. PI (Physik Instrumente) — a leading manufacturer of nanopositioning an ultra-precision motion-control equipment for nanotechnology, photonics and semiconductor applications — offers a new XYZ nanopositioning / scanning piezo system, dubbed P-733.3CD. These high-resolution stages are designed for materials research, high resolution microscopy and imaging applications. The parallel-kinematics design (only one common moving platform for XYZ) reduces the moved mass, and enables -- together with the stiff design--higher operating speeds than other piezo scanning stages.
Features & Advantages: - Travel Ranges of 100 x 100 µm in X/Y and 10 µm in Z
- Direct Metrology with Capacitive Sensors for up to 0.1 Nanometers Resolution
- Parallel Kinematics for Better Multi-Axis Accuracy and Dynamics
- 50 x 50 mm Clear Aperture for Transmitted-Light Applications
Typical Applications: Scanning Microscopy, Nanomanipulation, Metrology / Interferometry, Biotechnology, Semiconductor Testing, Mask / Wafer Positioning, Image Enhancement / Stabilization
Typical Applications: Scanning Microscopy, Nanomanipulation, Metrology / Interferometry, Biotechnology, Semiconductor Testing, Mask / Wafer Positioning, Image Enhancement / Stabilization
For More Information Visit:
http://www.physikinstrumente.com/en/products/prdetail.php?sortnr=201200
About P-733.3CD Nanopositioning Scanning Stages
P-733 are fast and highly accurate XYZ nanopositioning and scanning stages. These piezo systems provide a positioning and scanning range of 100x100x10µm together with sub-nanometer precision. The large clear aperture is an advantage in transmitted-light applications. The high-speed Z-axis (sub-millisecond response time) can actively compensate out-of-plane, Z-axis deviation during XY scans.
Capacitive Nano Measuring Sensors Provide Higher Linearity
Capacitive nano-measuring sensors read the platform position directly and without physical contact. This makes them free of friction and hysteresis, and allows very high levels of linearity, up to 99.99% with resolution to 0.1 nanometers. The Parallel Metrology configuration measures all axes against the same fixed reference, providing better precision than serial (individual) metrology.
Parallel Kinematics / Parallel Metrology for High Trajectory Fidelity
In a parallel kinematics multiaxis system, all actuators act directly on the same moving platform. This means symmetrical dynamic properties of the X and Y axes, a prerequisite for fast, high-linearity
About PI
PI is a leading manufacturer of nanopositioning and precision motion-control equipment for photonics, nanotechnology, semiconductor and life science applications. PI has been developing and manufacturing standard & custom precision products with piezoelectric and electromagnetic drives for 35+ years. The company has been ISO 9001 certified since 1994 and provides innovative, high-quality solutions for OEM and research. PI is present worldwide with eight subsidiaries and total staff of 450+.
For More Information Visit:
http://www.physikinstrumente.com/en/products/prdetail.php?sortnr=201200
|
