24 Nov 2006 Short pulse Excimer Laser. Available from 157nm to 351nm and with repetition rates up to 500Hz. The ATLEX series of short pulse excimer lasers employs state-of-the-art metal-ceramic technology and creates powerful new concepts in equipment and design of the discharge process. The patented OPEC technique of intensified ultra-fast preionization provides highly efficient laser performance with pulse duration of a few nanoseconds and enhanced reliability of all high voltage components.
The main features of ATLEX laser design are:
- OPEC – ultra-fast preionization technique (patented)
- Laser tube volume less than 2.5 litres
- Total metal-ceramic tube
- Air-cooled; even up to 500 Hz rep. rate
- RS-485 interface for system integration
- Meets European CE standard
- Handheld controller
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