20 Oct 2006 Soft x-ray filament source useful in the 1 to 30nm region. A stable and reproducible source of K-band lines. Many anodes are available; boron, carbon, magnesium, oxygen, aluminum and nitrogen, etc. The McPherson, Inc. Extreme Ultraviolet (EUV) Light Source, model 642, is similar to sealed x-ray tubes. For research however, it utilizes a filament to produce electrons that are in turn accelerated toward a target by high voltage. The interaction of the electrons as they impact the solid target (anode) causes excitation of the atomic inner shells with subsequent decay and emission. The output emission spectrum of the source follows the target anode material valence band structure.
The McPherson, Inc. 642 source is not a sealed tube so users can exchange anodes in order to produce desired wavelengths, e.g. Boron for 6.7nm, Silicon for 13.5nm, Aluminum for 17.1nm, etc. Many different anodes have been characterized and are available for purchase as accessories. The 642 also features two symmetrical output beams. It is useful for sample/reference comparison in a variety of test setups. The model 642 is stable, the output debris free, and the source compact, and controllable. This source is easy to set up and provides an alternative for the laboratory doing at wavelength test or metrology of EUV lithography related materials (filters, resists, optical systems) as well as multilayer or grazing incidence optical systems for astrophysics and other fundamental research. |
