18 Aug 2006 PI (Physik Instrumente) L.P., offers the P-621.2CD ... P-628.2CD family of very compact XY nanopositioning tables. Auburn, MA, - PI (Physik Instrumente) L.P., a leading manufacturer of nanopositioning and precision motion-control equipment for bio / nanotechnology, photonics, semiconductor and life science applications, offers the P-621.2CD ... P-628.2CD family of compact XY nanopositioning tables.
These precision flexure-guided systems can be used for scanning and static positioning and provide travel ranges of 50x50 to 1000 x100 µm.
Typical Applications
Scanning Probe Microscopy, Nanometrology, Biotechnology, Interferometry, Nanopositioning, Quality Assurance, Semiconductor Technology
Controllers: High Speed, Digital Control
A variety of ultra-low-noise 32-bit digital controllers provide fast communications and come with a wide selection of software tools.
Smaller than a Credit Card, Very Stiff Design and Travel Ranges to 1000 µm The compact size is achieved with a new, friction-free and extremely stiff flexure system, which also provides fast response and excellent guiding accuracy. Trajectory precision is in the low-nanometer range. High acceleration forces are provided by multiple, newly-developed high-force multilayer piezoelectric linear actuators.
Features & Advantages
50x50 to 1000 x 1000 µm XY-Travel
Closed-Loop Digital Control for Up to 99.98 % Position Accuracy
Vacuum-Compatible
Stiff and Compact Design for High Resonant Frequencies and Easy Integration
Resolution <1 nm
Frictionless, Maintenance-Free Precision Flexure Guiding System
Ceramic-Encapsulated Piezo Drives for Humidity Protection
Capacitive Direct-Metrology Sensors for Faster Servo Response
Maintenance-Free, No Wear & Tear because flexure-guides, piezoelectric actuators and sensors are all frictionless and maintenance-free, these nanopositioning systems achieve outstanding levels of reliability. The integrated multilayer piezo drives are protected against humidity by a patented ceramic-encapsulation.
Higher Linearity Through Direct-Motion Metrology with Capacitive Sensors The stages are equipped with non-contact capacitive-sensors and provide motion linearity to 0.02% with effective resolution in the sub-nanometer range. PI capacitive sensors are absolute-measuring, direct-metrology devices that boast very high bandwidth and exhibit no periodic errors.
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