11 Jul 2006 The high-load Hexapod combines extremely high precision with a load capacity of up to 1000 kg. It provides minimum incremental motion to 0.8 µm and 1 µrad, respectively. June 2006 - PI (Physik Instrumente) L.P., a leading manufacturer of nanopositioning and precision motion-control equipment for optics, nanotechnology, photonics, semiconductor and life science applications, offers has designed a unique high-load Hexapod for astronomy applications and other alignment tasks.
The high-load Hexapod combines extremely high precision with a load capacity of up to 1000 kg. It provides minimum incremental motion to 0.8 µm and 1 µrad, respectively. The six individual actuators have a design resolution of 0.08 µm and a stiffness of 40 N/µm.
Features
1000 kg Load Capacity (Vertical)
Six Degrees of Freedom
Works in Any Orientation
No Moving Cables for Improved Reliability and Precision
Repeatability to 0.5 µm
Actuator Resolution 0.008 µm
Vacuum-Compatible Versions
Linear and Rotary Multi-Axis Scans
Virtualized Center of Rotation (Pivot Point)
Sophisticated Controller Using Vector Algorithms
Heavy-Duty, Ultra-High-Resolution Bearings for 24/7 Applications
Hexapod Working Principle and Advantages
The M-850 Hexapod is driven by six high-resolution actuators all connected directly to the same moving platform. The principle is similar to that seen in flight simulators, but considerably more precise. In place of the hydraulic actuators used there, the M-850 uses custom high-load precision screws and servo-motors. It can withstand loads of 1000 kg vertically, and at least 180 kg in any direction.
More at: http://www.hexapods.net
Technical Specifications: Number of Axes: 6
Linear travel range XYZ: 24 mm
Rotation range: 8 deg. (rot z) 6 deg. (rot x, y)
Actuator design resolution: < 0.08 µm
Minimum incremental motion XYZ: 0.8 µm
Minimum incremental motion Rot xyz: 1 µrad
Repeatability X, Y: 1 µm
Repeatability Z: 0.5 µm
Max Linear Velocity XYZ: 0.5 mm/s
Max Rotary Velocity: 6 mrad/s
Actuator Stiffness: 40 N / µm
Load capacity: up to 1000 kg (depends on orientation)
Weight: 450 kg
Typical Applications
Alignment and tracking of optics, electron beams; fine positioning of active secondary mirror platforms in astronomical telescopes
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