21 Sep 2007 Hybrid Precision Nanopositioning Z-Stage Combines Advantages of Piezoelectrics and Servo Drives. PI New Product Release:
Hybrid Precision Z-Stage Combines Advantages of Piezoelectrics and Servo Drives
Auburn, MA, - June 2006 - PI (Physik Instrumente) L.P., a leading manufacturer of nanopositioning and precision motion-control equipment for nanotechnology, photonics, semiconductor and life science applications, introduces the world s first world s first fully-integrated hybrid Z-nanopositioning system employing piezoelectric and DC-motor drives.
The M-714 precision Z-stage / C-702 Hybrid Controller combine the well-known piezo drive advantages of unlimited resolution and very fast response with the long travel ranges and high holding forces of a servo-motor / ballscrew arrangement.
More Information and a Video Animation on the Hybrid Principle is available here
Typical Applications:
Surface Inspection, Microscopy, Laser Technology, Interferometry Metrology
Features & Advantages
- 2 Nanometer Linear Encoder Resolution
- Active Compensation of Stick/Slip During Startup and Settling
- Active Backlash Compensation
- Excellent Velocity Control
- Millisecond Settling to Nanometer Accuracy
- Reliable Execution of Nanometer Level Increments
- 7 mm (1/4 inch) Vertical Travel Range
- High Holding Forces with Minimum Power Consumption
- 10 kg (22 lbs) Vertical Load Capacity
- No Counterbalance Mechanism Required
Hybrid Controller Technology is Key to Success
The highly specialized C-702 Hybrid Controller reads stage position from an integrated, 2 nm precison linear encoder and continuously actuates both the piezoelectric and servo motor drives in a way to provide the best possible overall performance. Due to their instantaneous, sub-millisecond response, the integrated piezo actuators provide active stick/slip compensation during startup and settling. They also improve velocity control and positioning performance when nanometer level steps need to be executed.
Novel High-Bandwidth Encoder Interface, Realtime Operating System
The C-702 Hybrid controller is equipped with a novel high-speed encoder interface and can handle encoder count rates of 100 million pulses per second. Thanks to its real-time operating system, the intricacies of the hybrid drive are completely transparent to the user. Interface to the host computer is via TCP/IP or RS-232; this interface makes it possible to operate and monitor the system over any TCP/IP-compatible network (intranet/internet).
100 mm Translation and hybrid translation Stages Also Available.
About PI
PI, a global, ISO 9001 certified market leader in the field of nanopositioning technology, has been developing and manufacturing standard, custom and OEM products with piezo and motor drives for 35+ years. PI is present worldwide with eight subsidiaries and total staff of 400+. |
