24 Sep 2007 XY-Piezoelectric Nanometrology Stages Feature Record Travel Range XY Piezoelectric Nanometrology Stages Feature 1500 µm Record Travel Range
PI (Physik Instrumente) a leading manufacturer of
nanopositioning and precision motion-control equipment for bio / nanotechnology, photonics, semiconductor and life science applications, offers the new closed-loop P-628.2CD XY piezoelectric stages.
These precision flexure-guided scanning stages provide a record travel range of 1000 µm and allow nanometrology / precision microscopy instrument designers to probe much larger areas than before. A lower cost, single axis version is also offered.
Typical Applications
Scanning Probe Microscopy, Nanometrology, Biotechnology, Interferometry, Nanopositioning, Quality Assurance, Semiconductor Technology
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Record Travel Range of 1500 µm, Yet Very Stiff and Precise
The long travel range is achieved with a newly designed, friction-free and extremely stiff flexure system, which also offers rapid response and excellent guiding accuracy
with trajectory precision in the low-nanometer range. High acceleration forces are provided by multiple, newly-developed high-force multilayer piezo stack actuators.
Controllers: High Speed, Digital Control
A variety of ultra-low-noise 32-bit digital controllers provide fast communications and come with a wide selection of software tools.
Features & Advantages
* 1500 µm XY-Travel Allows Probing Larger Parts.
* Closed-Loop Digital Control for Up to 99.98 % Position Accuracy
* Vacuum-Compatible
* Stiff and Compact Design for High Resonant Frequencies and Easy Integration
* Resolution <1 nm
* Frictionless, Maintenance-Free Precision Flexure Guiding System
* Ceramic-Encapsulated Piezo Drives for Humidity Protection
* Capacitive Direct-Metrology Sensors for Faster Servo Response
Maintenance-Free, No Wear & Tear
Because flexure-guides, actuators and sensors are all frictionless and maintenance-free, these nanopositioning systems achieve outstanding levels of reliability. The integrated multilayer piezo drives are protected against humidity by a patented ceramic-encapsulation.
Higher Linearity Through Direct-Motion Metrology with Capacitive Sensors
The stages are equipped with non-contact capacitive-sensors and provide motion linearity to 0.02% with effective resolution in the sub-nanometer range. PI capacitive
sensors are absolute-measuring, direct-metrology devices that boast very high bandwidth and exhibit no periodic errors.
More Information on Long Travel Piezo Stages
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