09 Jun 2006 XY Piezoelectric Nanometrology Stages Feature Record Travel Range Auburn, MA, - June 2006 - PI (Physik Instrumente) L.P., a leading manufacturer of nanopositioning and precision motion-control equipment for bio / nanotechnology, photonics, semiconductor and life science applications, offers the new closed-loop P-628.2CD XY piezoelectric stages.
These precision flexure-guided scanning stages provide a record travel range of 1000 µm and allow nanometrology / precision microscopy instrument designers to probe much larger areas than before. A lower cost, single axis version is also offered.
Typical Applications Scanning Probe Microscopy, Nanometrology, Biotechnology, Interferometry, Nanopositioning, Quality Assurance, Semiconductor Technology.
Record Travel Range of 1000 µm, Yet Very Stiff and Precise
The long travel range is achieved with a newly designed, friction-free and extremely stiff flexure system, which also offers rapid response and excellent guiding accuracy with trajectory precision in the low-nanometer range. High acceleration forces are
provided by multiple, newly-developed high-force multilayer piezo stack actuators.
Controllers: High Speed, Digital Control
A variety of ultra-low-noise 32-bit digital controllers provide fast communications and come with a wide selection of software tools.
Features & Advantages
- 1000 µm XY-Travel Allows Probing Larger Parts.
- Closed-Loop Digital Control for Up to 99.98 % Position Accuracy
- Vacuum-Compatible
- Stiff and Compact Design for High Resonant Frequencies and Easy Integration
- Resolution <1 nm
- Frictionless, Maintenance-Free Precision Flexure Guiding System
- Ceramic-Encapsulated Piezo Drives for Humidity Protection
- Capacitive Direct-Metrology Sensors for Faster Servo Response
Maintenance-Free, No Wear & Tear
Because flexure-guides, actuators and sensors are all frictionless and maintenance-free, these nanopositioning systems achieve outstanding levels of reliability. The integrated multilayer piezo drives are protected against humidity by a patented ceramic-encapsulation.
Higher Linearity Through Direct-Motion Metrology with Capacitive Sensors
The stages are equipped with non-contact capacitive-sensors and provide motion linearity to 0.02% with effective resolution in the sub-nanometer range. PI capacitive sensors are absolute-measuring, direct-metrology devices that boast very high bandwidth and exhibit no periodic errors. |
