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FPA Flexure-Guided Piezoelectric Actuators

17 Mar 2006

DSM's flexure-guided piezoelectric actuators provide from 0.1 to 2 mm of displacement range in compact, high-force designs.

DSM's flexure-guided piezoelectric actuators provide from 0.1 to 2 mm of displacement range in compact, high-force designs. The FPA actuator architecture enables high dynamic bandwidth for rapid positioning. The FPA piezo actuators are constructed with stainless steel or titanium flexure amplification mechanisms. Standard voltage range for the piezo material is -30 to +150V, and other voltages are available upon request. The simple and clean construction allows the FPA designs to be prepared for vacuum applications, and the titanium versions can be used successfully in MRI environments. Typical applications for the FPA family include beam steering and scanning, optical positioning, switching, wafer positioning, inspection, materials research, nanoindentation, vibration mitigation, dynamic load balancing, and precision stage positioning. Custom adaptations or designs are available upon request.

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