Hybrid Hexapod

ALIO’s patented next generation Hybrid Hexapod® takes a different approach to traditional 6 Degree of Freedom (6-DOF) positioning devices, and exhibits much higher performance at extremely competitive prices. The Hybrid Hexapod® combines a precision XY monolithic stage, tripod, and continuous rotation theta-Z axis. This renders traditional hexapod kinematics obsolete, with orders-of-magnitude improvements in precision, path performance, speed, stiffness and a larger work envelope with virtually unlimited XY travel, and fully programmable tool-center point locations.

The Hybrid Hexapod® has less than 100 nm 3-Dimensional 6 axis Point Precision® repeatability, making it an essential technology for mission critical applications in the laser processing, optical inspection, photonics, semiconductor, metrology, and medical device sectors, and indeed all micro-machining projects.