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TeraView launches inspection system to meet needs of advanced IC packaging

Date Announced: 01 Jun 2022

Cambridge, UK – TeraView, the pioneer and leader in terahertz technology and solutions (https://teraview.com/), is pleased to announce the launch of the purpose built integrated circuit package inspection system, the EOTPR 4500.  

Dr. Jesse Alton, Semiconductor Product and Applications Manager at TeraView, commented “The key feature of the EOTPR 4500 are the auto prober technology we developed to meet the challenges of the most advanced IC packaging technology by accommodating the substrate size of up to 150mmx150mm while improving  the  probe tip placement accuracy to +/- 0.5 µm. 

"The new auto prober enables our customers to probe very large chip-let devices with the landing contact size of less than 5 µm such as copper pillars and TSV tips.  We closely collaborated with a major advanced packaging customer to develop this product, and the product has completed a rigorous beta site testing period at this customer site to ensure that the new product is production ready.”

Martin Igarashi, TeraView’s VP of Semiconductor Business, commented “We have realized most of the probe stations are inadequate to meet the demand of the IC packaging probing which is quite different from the wafer probing since wafer surfaces are completely flat.  What this means is that the wafer based probe stations can crush or stress the probing points such as TSVs, or they need to land the probe tip painfully slow to avoid introducing artefacts into the target sample.

"This product enables our customers to isolate faults in their most advanced IC packaging devices while taking advantage of EOTPR’s industry leading sub-5 µm distance-to-defect capability.  It also offers a device under test (DUT) heater that goes up to 250 °C, which means a customer who are working on advanced graphics engines or autonomous driving AI engines can now isolate faults on their devices while simulating the working conditions of these devices.”

Dr. Don Arnone, TeraView’s CEO, commented “This is another first from TeraView to introduce a product that is purpose built for very demanding advanced IC packaging market.  We are pleased to have a close collaboration with a major customer to develop this product, and we are quite confident that this product will set a new standard in advanced IC packaging failure analysis.  Combined with TeraView’s TeraCota automotive paint thickness inspection system, TeraView can address the growing needs of the automotive IC industry with this product.”

The EOTPR 4500 is available to purchase now, and the lead time of this product is 27 weeks ARO.

About Terahertz

Terahertz light lies between infra-red and microwaves, and as such has unique properties which enables it to pass through objects and to transmit images and compositional (spectroscopic) information that is ordinarily hidden. Terahertz is non-destructive, safe and fast, making it the ideal inspection and imaging modality for many applications across a range of industries. Terahertz also has the inherently high bandwidth needed for next generation high speed wireless communications at terabit (1012 bit) data rates.

TeraView has demonstrated the potential of terahertz technology in a number of applications including the detection of faults and quality issues in semiconductors, monitoring the quality of pharmaceutical drugs and high value coatings used in automotive, aerospace and other industries.

About TeraView

TeraView is the world’s first and leading company solely focused on the application of terahertz light to provide solutions to customer issues. A spin out from the Toshiba Corporation and Cambridge University, TeraView has developed its proprietary technology across a number of markets. These include fault analysis and quality assurance for semiconductor chips used in mobile computing and communications, as well as non-destructive inspection of high value coatings used in the automotive, pharmaceutical, food and solar industries.

With the largest number of systems in the field, as well as applications know-how made available to customers via a team of dedicated engineers using intellectual property and knowledge in peer-reviewed scientific publications, TeraView is uniquely placed to deliver the business benefits of terahertz to customers. Headquartered in Cambridge UK, sales and customer support are available throughout the Far East, North America and Europe either directly or through a network of distributors.


1, Enterprise
Cambridge Research Park
CB25 9PD
United Kingdom
T: +44 (0)1223 435380

E-mail: marketing@teraview.com

Web Site: teraview.com

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